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Alan Lindsay
IAM M.Sc. Student, Department of Mathematics

Plate MEMS Capacitor Devices

Plate micro-electro-mechanical systems (MEMS) incorporate electronics and mechanical devices on a tiny scale to create various types of microscopic machinery. The manufacturing techniques which have made MEMS feasible borrow heavily from those utilized in the microprocessor industry and are therefore relatively well developed; however, the same cannot be said for our understanding of physical processes on such small scales. In this talk, I will introduce a component common to many MEMS devices and discuss some mathematical models capturing its behavior.

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